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  本文關(guān)鍵詞：電容式單質(zhì)量三軸加速度計(jì)的研制　出處：《蘇州大學(xué)》2015年碩士論文　論文類型：學(xué)位論文

  更多相關(guān)文章： MEMS 電容式加速度計(jì) 單一敏感質(zhì)量

【摘要】：電容式加速度計(jì)廣泛應(yīng)用于國防、航空航天、汽車、通信等軍用民用領(lǐng)域,是當(dāng)前市場的主流和研究的熱點(diǎn)。隨著應(yīng)用領(lǐng)域的不斷擴(kuò)大,單雙軸電容式加速度計(jì)已無法滿足使用的需求,三軸電容式加速度計(jì)集成成為重要的發(fā)展方向之一。本課題旨在研制一種基于單一敏感質(zhì)量的三軸電容式加速度計(jì),重點(diǎn)從電容式單質(zhì)量三軸加速度計(jì)的結(jié)構(gòu)設(shè)計(jì)、仿真優(yōu)化和工藝制作三方面入手,研究提高器件靈敏度、降低非線性度、減小布朗噪聲和交叉軸靈敏度的方法。本文首先針對平板電容的檢測方法和結(jié)構(gòu)進(jìn)行分析研究,提出電容式單質(zhì)量三軸加速度計(jì)的結(jié)構(gòu)模型,分析其工作原理和耦合情況。基于力學(xué)法和能量法,建立彈性梁的理論模型,推導(dǎo)梁在器件工作模態(tài)的剛度公式。針對檢測梳齒的工作原理進(jìn)行分析,建立其等效模型。根據(jù)以上模型,理論計(jì)算電容式單質(zhì)量三軸加速度計(jì)的各項(xiàng)性能參數(shù)。基于位移法和諧振頻率法,運(yùn)用有限元仿真軟件,模擬驗(yàn)證梁在工作模態(tài)下剛度公式的準(zhǔn)確性,并依此進(jìn)行優(yōu)化。模擬器件的工作模態(tài),分析其靈敏度和許用應(yīng)力情況。針對工藝和使用過程中熱機(jī)械應(yīng)力對器件性能的影響進(jìn)行仿真分析,驗(yàn)證器件對應(yīng)力的敏感程度。介紹電容式單質(zhì)量三軸加速度計(jì)的引線層、中間連接層、結(jié)構(gòu)層和pad層的版圖繪制。采用基于表面硅工藝的多晶硅外延技術(shù)實(shí)現(xiàn)器件的加工制作。針對制作工藝對器件結(jié)構(gòu)性能的影響進(jìn)行分析,優(yōu)化工藝流程。建立電容式單質(zhì)量三軸加速度計(jì)的測試平臺,對其性能指標(biāo)進(jìn)行測試分析。通過對比分析測試值和理論值的差異性,驗(yàn)證理論設(shè)計(jì)的正確性,同時(shí)驗(yàn)證電容式單質(zhì)量三軸加速度計(jì)性能指標(biāo)達(dá)到設(shè)計(jì)要求。
[Abstract]:Capacitive accelerometers are widely used in military and civil fields such as national defense, aerospace, automobile, communication and so on. Single and double axis capacitive accelerometers can no longer meet the needs of use. The integration of three-axis capacitive accelerometers has become one of the important development directions. The purpose of this paper is to develop a three-axis capacitive accelerometer based on single sensitive mass. Focusing on the capacitive single-mass three-axis accelerometer structure design, simulation optimization and processing three aspects, research to improve the device sensitivity and reduce the degree of nonlinearity. The method of reducing Brownian noise and cross-axis sensitivity. Firstly, the detection method and structure of plate capacitance are analyzed and studied, and the structure model of capacitive single-mass three-axis accelerometer is proposed. Based on the mechanical method and the energy method, the theoretical model of the elastic beam is established, and the stiffness formula of the beam working mode in the device is derived, and the working principle of detecting the comb tooth is analyzed. According to the above model, the performance parameters of capacitive single-mass three-axis accelerometer are calculated theoretically. Based on displacement method and resonant frequency method, finite element simulation software is used. The simulation verifies the accuracy of the stiffness formula of the beam in the working mode and optimizes the working mode of the device. The sensitivity and allowable stress are analyzed. The effect of thermo-mechanical stress on the performance of the device is simulated and analyzed. To verify the sensitivity of the device to stress. The lead layer and intermediate connection layer of capacitive single mass triaxial accelerometer are introduced. Structure layer and pad layer layout drawing. The polycrystalline silicon epitaxy technology based on surface silicon technology is used to realize the fabrication of the device. The effect of fabrication process on the structure and performance of the device is analyzed. Optimize the process flow. Establish the test platform of capacitive single-mass three-axis accelerometer, test and analyze its performance index. By comparing and analyzing the difference between the test value and the theoretical value, verify the correctness of the theoretical design. At the same time, the performance index of capacitive single-mass three-axis accelerometer is verified to meet the design requirements.
【學(xué)位授予單位】：蘇州大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2015
【分類號】：TH824.4

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本文編號：1415079