基于超磁致伸縮驅(qū)動微振動主動隔振平臺的設(shè)計研究
發(fā)布時間：2018-12-17 10:17
【摘要】：隨著超精密工程的迅猛發(fā)展，精密儀器對其工作環(huán)境的穩(wěn)定性提出了越來越高的要求。精密儀器在工作環(huán)境中經(jīng)常受到外界微振動的干擾，其中高頻微幅的振動干擾可以通過被動隔振方式將其隔離，而低頻多自由度微幅的振動干擾則需要通過多自由度主動隔振平臺將其隔離。 超磁致伸縮材料在超精密驅(qū)動工程中有著廣泛的應用，它有響應快速，應變大，，輸出應力大，控制精度高等優(yōu)點，同時也具有非線性、滯回等缺點，使得材料的理論建模和控制具有一定困難�，F(xiàn)有的超精密驅(qū)動器，無法兼?zhèn)浯笮谐�、大負載、高效率、高穩(wěn)定性的需求。面向這一需求，在原有的對于超磁致伸縮驅(qū)動器研究的基礎(chǔ)上，針對驅(qū)動位移大、負載能力強、驅(qū)動效率高、驅(qū)動穩(wěn)定性高的三自由度微振動主動隔振平臺設(shè)計方面進行了探索。本文對超磁致伸縮驅(qū)動平臺進行了靜力學結(jié)構(gòu)設(shè)計、結(jié)構(gòu)尺寸優(yōu)化和動力學仿真分析，并最終設(shè)計實現(xiàn)了三自由度微振動主動隔振平臺原型樣機。 在平臺的靜力學結(jié)構(gòu)設(shè)計部分，闡述了隔振平臺的整體結(jié)構(gòu)、工作原理；設(shè)計超磁致伸縮驅(qū)動器的各部分結(jié)構(gòu)，包括超磁致伸縮材料棒、電磁線圈、磁路；對放大機構(gòu)進行了靜力學方面的初步設(shè)計和強度校核；確定了平臺、驅(qū)動器和位移傳遞機構(gòu)的結(jié)構(gòu)形式。 基于驅(qū)動器的效率最高即能量損耗率最小的系統(tǒng)優(yōu)化設(shè)計原則，本論文對驅(qū)動器和放大機構(gòu)的結(jié)構(gòu)尺寸進行優(yōu)化設(shè)計。首先對驅(qū)動器從能量輸入到能量輸出整個過程的能量傳遞流程進行分析，將此流程分為電磁耦合、磁機耦合、機械能傳遞三個部分，針對每部分的能量轉(zhuǎn)換機理以驅(qū)動器的結(jié)構(gòu)參數(shù)為自變量推導出相應的能量損耗計算方法，以此建立平臺全系統(tǒng)的能量損耗率函數(shù)，從而推導出能量損耗率最小時的最優(yōu)化結(jié)構(gòu)尺寸參數(shù)，最終完成基于多參數(shù)優(yōu)化全系統(tǒng)的平臺集成設(shè)計。 在平臺的動力學仿真分析方面，建立單個驅(qū)動器及放大機構(gòu)的動力學模型，將其整合到全系統(tǒng)的動力學模型，將結(jié)構(gòu)參數(shù)的優(yōu)化結(jié)果帶入動力學模型，對優(yōu)化前后的動力學響應進行對比，包括不同輸入電流、不同負載情況下的位移響應、瞬時加速度響應，分析平臺的動力學性能，并依此判斷優(yōu)化方法的有效性。利用有限元仿真軟件對整個平臺進行模態(tài)分析，提取平臺的前八階的共振頻率和振型。 按照以上方法最后確定平臺的部件和總體結(jié)構(gòu)設(shè)計，繪制設(shè)計圖紙，并加工和裝配實現(xiàn)了原型樣機和完成了平臺功能實驗驗證。對每個驅(qū)動器進行性能測試，包括碟形彈簧的剛度確定、最佳預緊力調(diào)節(jié)、裝配可靠性的測試；組裝平臺整機，對其進行輸出響應測試，與動力學分析結(jié)果進行對比。 本文的最后對全文研究內(nèi)容進行總結(jié)，對其中的缺點和不足深入挖掘，提出未來的改進方法和展望。
[Abstract]:With the rapid development of ultra-precision engineering, precision instruments put forward higher and higher requirements for the stability of their working environment. Precision instruments are often disturbed by external micro-vibration in the working environment, in which high-frequency micro-amplitude vibration interference can be isolated by passive vibration isolation. The vibration disturbance of low frequency multi-degree-of-freedom microamplitude needs to be isolated by multi-degree-of-freedom active vibration isolation platform. Giant magnetostrictive material has been widely used in ultra-precision drive engineering. It has the advantages of fast response, large strain, large output stress, high control precision and so on. It is difficult to model and control the material theoretically. The existing ultra-precision drive can not meet the needs of long stroke, large load, high efficiency and high stability. In order to meet this demand, on the basis of the original research on giant magnetostrictive actuator, aiming at the large displacement, strong load capacity and high driving efficiency, The design of 3-DOF micro vibration active vibration isolation platform with high driving stability is explored. In this paper, the static structure design, structural size optimization and dynamic simulation analysis of the giant magnetostrictive drive platform are carried out, and the prototype of the three-degree-of-freedom active vibration isolation platform is designed and implemented. In the statics design part of the platform, the whole structure and working principle of the platform are described, and the structure of the giant magnetostrictive actuator is designed, including the giant magnetostrictive material rod, the electromagnetic coil and the magnetic circuit. The preliminary design and strength check of the amplifying mechanism are carried out, and the structural forms of the platform, the actuator and the displacement transfer mechanism are determined. Based on the principle of optimal design of the system with the highest efficiency, that is, the minimum energy loss rate, the structural dimensions of the actuator and the amplifying mechanism are optimized in this paper. Firstly, the energy transfer process from energy input to energy output is analyzed, which is divided into three parts: electromagnetic coupling, magneto-mechanical coupling and mechanical energy transfer. According to the energy conversion mechanism of each part, the corresponding energy loss calculation method is derived with the structural parameters of the driver as the independent variable, and the energy loss rate function of the whole platform system is established. Thus, the optimal structural dimension parameters are derived when the energy loss rate is minimum, and the platform integration design based on multi-parameter optimization is finally completed. In the aspect of dynamic simulation analysis of the platform, the dynamic model of single driver and amplifying mechanism is established, which is integrated into the dynamic model of the whole system, and the optimization results of structural parameters are brought into the dynamic model. The dynamic response before and after optimization is compared, including displacement response under different input current, displacement response under different load and instantaneous acceleration response. The dynamic performance of the platform is analyzed, and the effectiveness of the optimization method is judged. The modal analysis of the whole platform is carried out by using finite element simulation software, and the first eight resonance frequencies and modes of the platform are extracted. According to the above methods, the design of the components and the overall structure of the platform is determined, the design drawings are drawn, the prototype is machined and assembled, and the experimental verification of the platform function is completed. The performance of each actuator is tested, including the stiffness determination of the disc spring, the optimal pretightening force adjustment, the assembly reliability test, and the output response test of the whole assembly platform, which is compared with the dynamic analysis results. At the end of this paper, the research contents are summarized, the shortcomings and shortcomings are deeply excavated, and the improvement methods and prospects in the future are put forward.
【學位授予單位】：上海交通大學
【學位級別】：碩士
【學位授予年份】：2014
【分類號】：TB535.1
本文編號：2384067
[Abstract]:With the rapid development of ultra-precision engineering, precision instruments put forward higher and higher requirements for the stability of their working environment. Precision instruments are often disturbed by external micro-vibration in the working environment, in which high-frequency micro-amplitude vibration interference can be isolated by passive vibration isolation. The vibration disturbance of low frequency multi-degree-of-freedom microamplitude needs to be isolated by multi-degree-of-freedom active vibration isolation platform. Giant magnetostrictive material has been widely used in ultra-precision drive engineering. It has the advantages of fast response, large strain, large output stress, high control precision and so on. It is difficult to model and control the material theoretically. The existing ultra-precision drive can not meet the needs of long stroke, large load, high efficiency and high stability. In order to meet this demand, on the basis of the original research on giant magnetostrictive actuator, aiming at the large displacement, strong load capacity and high driving efficiency, The design of 3-DOF micro vibration active vibration isolation platform with high driving stability is explored. In this paper, the static structure design, structural size optimization and dynamic simulation analysis of the giant magnetostrictive drive platform are carried out, and the prototype of the three-degree-of-freedom active vibration isolation platform is designed and implemented. In the statics design part of the platform, the whole structure and working principle of the platform are described, and the structure of the giant magnetostrictive actuator is designed, including the giant magnetostrictive material rod, the electromagnetic coil and the magnetic circuit. The preliminary design and strength check of the amplifying mechanism are carried out, and the structural forms of the platform, the actuator and the displacement transfer mechanism are determined. Based on the principle of optimal design of the system with the highest efficiency, that is, the minimum energy loss rate, the structural dimensions of the actuator and the amplifying mechanism are optimized in this paper. Firstly, the energy transfer process from energy input to energy output is analyzed, which is divided into three parts: electromagnetic coupling, magneto-mechanical coupling and mechanical energy transfer. According to the energy conversion mechanism of each part, the corresponding energy loss calculation method is derived with the structural parameters of the driver as the independent variable, and the energy loss rate function of the whole platform system is established. Thus, the optimal structural dimension parameters are derived when the energy loss rate is minimum, and the platform integration design based on multi-parameter optimization is finally completed. In the aspect of dynamic simulation analysis of the platform, the dynamic model of single driver and amplifying mechanism is established, which is integrated into the dynamic model of the whole system, and the optimization results of structural parameters are brought into the dynamic model. The dynamic response before and after optimization is compared, including displacement response under different input current, displacement response under different load and instantaneous acceleration response. The dynamic performance of the platform is analyzed, and the effectiveness of the optimization method is judged. The modal analysis of the whole platform is carried out by using finite element simulation software, and the first eight resonance frequencies and modes of the platform are extracted. According to the above methods, the design of the components and the overall structure of the platform is determined, the design drawings are drawn, the prototype is machined and assembled, and the experimental verification of the platform function is completed. The performance of each actuator is tested, including the stiffness determination of the disc spring, the optimal pretightening force adjustment, the assembly reliability test, and the output response test of the whole assembly platform, which is compared with the dynamic analysis results. At the end of this paper, the research contents are summarized, the shortcomings and shortcomings are deeply excavated, and the improvement methods and prospects in the future are put forward.
【學位授予單位】：上海交通大學
【學位級別】：碩士
【學位授予年份】：2014
【分類號】：TB535.1
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