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【摘要】：線鋸和進給系統(tǒng)是金剛石線鋸切割機最重要的兩個部件。線鋸作為線鋸切割機的刀具,其動態(tài)特性直接影響著晶片的表面粗糙度和損傷層的大小;金剛石線鋸切割機進給系統(tǒng)的動態(tài)特性直接影響機床的加工質(zhì)量和效率。因此,本文通過理論建模、有限元分析及動態(tài)特性實驗相結合的方法分析了線鋸和進給系統(tǒng)的動力學特性,研究內(nèi)容主要包括:建立了線鋸的有限元模型,分析了不同張緊力下線鋸的固有頻率,自由模態(tài)實驗顯示前3階固有頻率誤差在5%以內(nèi),從而驗證了有限元模型的正確性;在自由模態(tài)模型的基礎上完成了線鋸工作模態(tài)的分析與實驗驗證,結果顯示,切削參數(shù)不變時,線鋸張力越大其第1階工作模態(tài)越大�；�于二自由度理論建立了金剛石線鋸切割機進給系統(tǒng)的動力學方程,通過經(jīng)驗公式分別確定了軸向上絲杠、軸承與絲杠結合面、絲杠與螺母結合面的等效剛度以及側向上導軌與滑塊結合面的等效剛度,進而確定出進給系統(tǒng)前4階固有頻率解析值,為進給系統(tǒng)參數(shù)化建模與變動態(tài)特性研究奠定了分析基礎;建立了進給系統(tǒng)考慮結合面和不考慮結合面時的有限元分析模型,完成了相應的模態(tài)分析與諧響應分析,進給系統(tǒng)模態(tài)實驗顯示考慮結合面的進給系統(tǒng)有限元模型更精確,因此,研究線鋸切割機涉及的結合面特性是必要的。最后,為了完善金剛石線鋸切割機進給系統(tǒng)的有限元模型進而實現(xiàn)整機系統(tǒng)的動力學特性分析,設計了結合面特性研究的實驗平臺,并對其進行了強度校核,驗證了實驗平臺設計的合理性。
[Abstract]:Wire saw and feed system are the two most important parts of diamond wire saw cutting machine. As the cutting tool of wire sawing machine, the dynamic characteristics of wire saw directly affect the surface roughness and damage layer of the wafer, and the dynamic characteristics of the feed system of diamond wire saw cutting machine directly affect the machining quality and efficiency of the machine tool. Therefore, the dynamic characteristics of wire saw and feed system are analyzed by the methods of theoretical modeling, finite element analysis and dynamic characteristic experiment. The main research contents are as follows: the finite element model of wire saw is established. The natural frequencies of wire saws under different tension forces are analyzed. The free mode experiments show that the error of the first three natural frequencies is less than 5%, which verifies the correctness of the finite element model. Based on the free mode model, the working modes of wire saws are analyzed and verified by experiments. The results show that the higher the tension of wire saws is, the greater the first working mode of wire saws is when the cutting parameters are not changed. Based on the theory of two degrees of freedom, the dynamic equations of the feed system of diamond wire sawing machine are established. The equivalent stiffness of the joint surface of the screw and nut and the equivalent stiffness of the lateral upper guideway and the slider are determined, and the analytical values of the first four natural frequencies of the feed system are determined. It lays an analytical foundation for parametric modeling and variable dynamic characteristics of feed system. The finite element analysis model of the feed system with and without the joint surface is established, and the corresponding modal analysis and harmonic response analysis are completed. The modal experiment of the feed system shows that the finite element model of the feed system considering the combined surface is more accurate. Therefore, it is necessary to study the characteristics of the joint surface involved in the wire saw cutting machine. Finally, in order to perfect the finite element model of the feed system of diamond wire sawing machine and realize the dynamic characteristic analysis of the whole machine system, an experimental platform for the study of the characteristics of the interface is designed, and its strength is checked. The rationality of the design of the experimental platform is verified.
【學位授予單位】：西安理工大學
【學位級別】：碩士
【學位授予年份】：2017
【分類號】：TG48

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